Numerical study of the effect of gas temperature on the time for onset of particle nucleation in argon–silane low-pressure plasmas
Bhandarkar, Upendra, Kortshagen, Uwe, Girshick, Steven LVolume:
36
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/36/12/307
Date:
June, 2003
File:
PDF, 556 KB
english, 2003