[IEEE 2012 4th Electronic System-Integration Technology...

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[IEEE 2012 4th Electronic System-Integration Technology Conference (ESTC) - Amsterdam, Netherlands (2012.09.17-2012.09.20)] 2012 4th Electronic System-Integration Technology Conference - Analysis of microstructural evolution in SLID-bonding used for hermetic encapsulation of MEMS devices

Vuorinen, V., Dong, H., Xu, H., Vahanen, S., Suni, T., Laurila, T., Paulasto-Krockel, M.
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Year:
2012
Language:
english
DOI:
10.1109/estc.2012.6542136
File:
PDF, 825 KB
english, 2012
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