Characterization of Aligned Wafer-Level Transfer of Thin...

Journal of Microelectromechanical Systems 2007 / 12 Vol. 16; Iss. 6

Characterization of Aligned Wafer-Level Transfer of Thin and Flexible Parylene Membranes

Kim, Hanseup, Najafi, Khalil
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Volume:
16
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2007.906759
Date:
December, 2007
File:
PDF, 1.42 MB
english, 2007
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