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Dislocation Structure, Electrical and Luminescent Properties of Hydrophilically Bonded Silicon Wafer Interface
Bondarenko, Anton, Vyvenko, Oleg, Kolevatov, Iliya, Isakov, Ivan, Kononchuk, OlegVolume:
178-179
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/ssp.178-179.233
Date:
August, 2011
File:
PDF, 579 KB
english, 2011