Two-Dimensional Self-Consistent Simulation of a DC Magnetron Discharge
Shidoji, Eiji, Ohtake, Hiroto, Nakano, Nobuhiko, Makabe, ToshiakiVolume:
38
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.38.2131
Date:
April, 1999
File:
PDF, 206 KB
english, 1999