Deposition and Properties of the Pseudobinary Alloy (Al...

Japanese Journal of Applied Physics 2006 / 7 Vol. 45; Iss. 7

Deposition and Properties of the Pseudobinary Alloy (Al 2 O 3 ) x (TiO 2 ) 1- x and Its Application for Silicon Surface Passivation

Vitanov, P., Harizanova, A., Ivanova, T., Alexieva, Z., Agostinelli, G.
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Volume:
45
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.45.5894
Date:
July, 2006
File:
PDF, 320 KB
english, 2006
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