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[IEEE IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems - Miyazaki, Japan (23-27 Jan. 2000)] Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308) - A high pressure-resistance micropump using active and normally-closed valves
Shinohara, J., Suda, M., Furuta, K., Sakuhara, T.Year:
2000
Language:
english
DOI:
10.1109/memsys.2000.838495
File:
PDF, 498 KB
english, 2000