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Adsorption and reactivity of nitrogen atoms on silica surface under plasma exposure
Marinov, D, Guaitella, O, de los Arcos, T, von Keudell, A, Rousseau, AVolume:
47
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/47/47/475204
Date:
November, 2014
File:
PDF, 1.23 MB
english, 2014