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Formation of Diamond-Like Carbon Thin Films by Using Surface Discharge Plasma under Atmospheric Pressure
Yasui, Shinji, Hamada, HiroshiVolume:
52
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/jjap.52.11na03
Date:
November, 2013
File:
PDF, 1.38 MB
english, 2013