[Japan Soc. Appl. Phys Digest of Papers. Microprocesses and Nanotechnology 2001. 2001 International Microprocesses and Nanotechnology Conference - Shimane, Japan (31 Oct.-2 Nov. 2001)] Digest of Papers. Microprocesses and Nanotechnology 2001. 2001 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.01EX468) - Influence of thermal properties of polymers on NanoImprint Lithography performance
Perret, C., Gourgon, C., Micouin, G., Grolier, J.P.E.Year:
2001
Language:
english
DOI:
10.1109/imnc.2001.984107
File:
PDF, 288 KB
english, 2001