Metallic NEMS components fabricated from nanocomposite Al–Mo films
Lee, Z, Ophus, C, Fischer, L M, Nelson-Fitzpatrick, N, Westra, K L, Evoy, S, Radmilovic, V, Dahmen, U, Mitlin, DVolume:
17
Language:
english
Journal:
Nanotechnology
DOI:
10.1088/0957-4484/17/12/042
Date:
June, 2006
File:
PDF, 1.71 MB
english, 2006