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[IEEE 2013 IEEE International Electron Devices Meeting (IEDM) - Washington, DC, USA (2013.12.9-2013.12.11)] 2013 IEEE International Electron Devices Meeting - Opportunities and challenges of the 450mm transition
Lin, John, Lin, Pinyen, Ku, Wen-Yu, Kelling, Mark C., Akiki, Greg, Kwon, Sangdong, Lee, Kwangwook, Collison, Wenli, Chang, Stock, Cottle, Rand, Wang, Yu-Chih, Borst, Christopher, Skilbred, David, RobeYear:
2013
Language:
english
DOI:
10.1109/iedm.2013.6724626
File:
PDF, 2.15 MB
english, 2013