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[IEEE 2009 IEEE International Interconnect Technology Conference - IITC - Sapporo, Japan (2009.06.1-2009.06.3)] 2009 IEEE International Interconnect Technology Conference - A self-aligned airgap interconnect scheme
Chen, Hsien-Wei, Jeng, Shin-Puu, Tsai, Hao-Yi, Liu, Yu-Wen, Wei, Hsiu-Ping, Yu, Douglas C.H., Sun, Y.C.Year:
2009
Language:
english
DOI:
10.1109/iitc.2009.5090367
File:
PDF, 729 KB
english, 2009