[IEEE 2013 Symposium on Microelectronics Technology and Devices (SBMicro) - Curitiba, Brazil (2013.09.2-2013.09.6)] 28th Symposium on Microelectronics Technology and Devices (SBMicro 2013) - High quality TiO2 deposited by reactive sputtering. Structural and electrical peculiarities influenced by the specific experimental conditions
Libardi, J., Grigorov, K.G., Guerino, M., da Silva Sobrinho, A. S., Maciel, H. S., Soares, J. P., Massi, M.Year:
2013
Language:
english
DOI:
10.1109/sbmicro.2013.6676130
File:
PDF, 741 KB
english, 2013