[IEEE 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest - Maastricht, Netherlands (25-29 Jan. 2004)] 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest - A micro differential thermal analysis (μDTA) system
Ruther, P., Herrscher, M., Paul, O.Year:
2004
Language:
english
DOI:
10.1109/mems.2004.1290548
File:
PDF, 321 KB
english, 2004