[IEEE 2010 International Symposium on Micro-NanoMechatronics and Human Science (MHS) - Nagoya, Japan (2010.11.7-2010.11.10)] 2010 International Symposium on Micro-NanoMechatronics and Human Science - Proton Beam Writing micro fabrication system for micro chemical devices
Phi Nguyen Truong,, Teshima, Ryo, Hasegawa, Tadahiro, Nishikawa, HiroyukiYear:
2010
Language:
english
DOI:
10.1109/mhs.2010.5669508
File:
PDF, 1.73 MB
english, 2010