Multivariable feedback relevant system identification of a...

IEEE Transactions on Control Systems Technology 2001 / 3 Vol. 9; Iss. 2

Multivariable feedback relevant system identification of a wafer stepper system

de Callafon, R.A., Van den Hof, P.M.J.
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Volume:
9
Language:
english
Journal:
IEEE Transactions on Control Systems Technology
DOI:
10.1109/87.911390
Date:
March, 2001
File:
PDF, 216 KB
english, 2001
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