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Multivariable feedback relevant system identification of a wafer stepper system
de Callafon, R.A., Van den Hof, P.M.J.Volume:
9
Language:
english
Journal:
IEEE Transactions on Control Systems Technology
DOI:
10.1109/87.911390
Date:
March, 2001
File:
PDF, 216 KB
english, 2001