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[IEEE 2010 21st Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - San Francisco, CA, USA (2010.07.11-2010.07.13)] 2010 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Control of etch and deposition for embedded SiGe
Van Roijen, R., Kempisty, J., Sinn, C., Afoh, W., Tabakman, K., Logan, R.Year:
2010
Language:
english
DOI:
10.1109/ASMC.2010.5551434
File:
PDF, 685 KB
english, 2010