Design of experiment characterization of microneedle...

Journal of Micromechanics and Microengineering 2010 / 02 Vol. 20; Iss. 2

Design of experiment characterization of microneedle fabrication processes based on dry silicon etching

Held, J, Gaspar, J, Ruther, P, Hagner, M, Cismak, A, Heilmann, A, Paul, O
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Volume:
20
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/20/2/025024
Date:
February, 2010
File:
PDF, 1.52 MB
english, 2010
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