[IEEE 1998 International Conference on Ion Implantation...

  • Main
  • [IEEE 1998 International Conference on...

[IEEE 1998 International Conference on Ion Implantation Technology. Proceedings. Ion Implantation Technology - 98 - Kyoto, Japan (22-26 June 1998)] 1998 International Conference on Ion Implantation Technology. Proceedings (Cat. No.98EX144) - Implantation of nitrogen into polysilicon to suppress boron penetration through the gate oxide

Bauer, A.J., Mayer, P., Frey, L., Haublein, V., Ryssel, H.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
1
Year:
1998
Language:
english
DOI:
10.1109/iit.1999.812044
File:
PDF, 352 KB
english, 1998
Conversion to is in progress
Conversion to is failed