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[IEEE IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems - Kyoto, Japan (19-23 Jan. 2003)] The Sixteenth Annual International Conference on Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE - Normally-closed, leak-tight piezoelectric microvalve under ultra-high upstream pressure for integrated micropropulsion
Eui-Hyeok Eh,, Choonsup Lee,, Mueller, J.Year:
2003
Language:
english
DOI:
10.1109/MEMSYS.2003.1189692
File:
PDF, 315 KB
english, 2003