Electrical and Reliability Studies of “Wet $...

IEEE Transactions on Device and Materials Reliability 2007 / 09 Vol. 7; Iss. 3

Electrical and Reliability Studies of “Wet $ \hbox{N}_{2}\hbox{O}$” Tunnel Oxides Grown on Silicon for Flash Memory Applications

Babu, P.N., Govind, G., Prasad, S.M.S., Bhat, K.N.
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Volume:
7
Language:
english
Journal:
IEEE Transactions on Device and Materials Reliability
DOI:
10.1109/tdmr.2007.907295
Date:
September, 2007
File:
PDF, 299 KB
english, 2007
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