[IEEE 2010 11th International Conference and Seminar of Young Specialists on Micro/Nanotechnologies and Electron Devices (EDM 2010) - Novosibirsk, Russia (2010.06.30-2010.07.4)] 2010 11th International Conference and Seminar on Micro/Nanotechnologies and Electron Devices - Technological and physical problems of InAs-linear IR Mis-structures array

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