MOCVD of PZT Thin Films with Different Precursor Solutions...

Journal of The Electrochemical Society 2003 Vol. 150; Iss. 10

MOCVD of PZT Thin Films with Different Precursor Solutions for Testing Mass-Production Compatibility

Jeong, Seehwa, Shi-Zhao, Jin, Kim, Hye Ryoung, Park, Dong-Yeon, Hwang, Cheol Seong, Han, Young Ki, Yang, Cheol Hoon, Oh, Ki Young, Kim, Seung-Hyun, Lee, Dong-Soo, Ha, Jowoong
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Volume:
150
Year:
2003
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.1602082
File:
PDF, 477 KB
english, 2003
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