[IEEE 2001 8th International Symposium on the Physical and Failure Analysis of Integrated Circuits. IPFA 2001 - Singapore (9-13 July 2001)] Proceedings of the 2001 8th International Symposium on the Physical and Failure Analysis of Integrated Circuits. IPFA 2001 (Cat. No.01TH8548) - Effects of electron-beam lithography on thin gate oxide reliability
Pei Fen Chong,, Byung Jin Cho,, Eng Fong Chor,, Moon Sig Joo,Year:
2001
Language:
english
DOI:
10.1109/IPFA.2001.941454
File:
PDF, 302 KB
english, 2001