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Lighthouse Plasma Instability in a Capacitive RF Discharge
Wegner, Thomas, Kullig, Christian, Meichsner, JurgenVolume:
42
Language:
english
Journal:
IEEE Transactions on Plasma Science
DOI:
10.1109/TPS.2014.2326524
Date:
October, 2014
File:
PDF, 306 KB
english, 2014