High speed micro-fabrication using inductively coupled...

Vacuum 2015 / 01 Vol. 111

High speed micro-fabrication using inductively coupled plasma ion source based focused ion beam system

Menon, Ranjini, Nabhiraj, P.Y.
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Volume:
111
Language:
english
Journal:
Vacuum
DOI:
10.1016/j.vacuum.2014.10.014
Date:
January, 2015
File:
PDF, 693 KB
english, 2015
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