Rapid thermal annealing of polysilicon thin films

Journal of Microelectromechanical Systems 1998 / Dec. Vol. 7; Iss. 4

Rapid thermal annealing of polysilicon thin films

Xin Zhang,, Tong-Yi Zhang,, Man Wong,, Yitshak Zohar,
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Volume:
7
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/84.735342
Date:
January, 1998
File:
PDF, 355 KB
english, 1998
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