[IEEE 2014 20th International Conference on Ion Implantation Technology (IIT) - Portland, OR, USA (2014.6.26-2014.7.4)] 2014 20th International Conference on Ion Implantation Technology (IIT) - Fabrication of high-performance carbon nanotube field-effect transistors (CNTFETs) and CNTFET-based electronic circuits with semiconductors as the source/drain contact materials

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