Suppression of High-Energy Backscattered Particles in...

Japanese Journal of Applied Physics 2007 / 12 Vol. 46; Iss. 12

Suppression of High-Energy Backscattered Particles in Magnetron Plasma Using Cylindrical Cathode

Takagi, Yusuke, Toyoda, Hirotaka, Sugai, Hideo
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Volume:
46
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.46.7865
Date:
December, 2007
File:
PDF, 373 KB
english, 2007
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