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[IEEE 2007 IEEE Conference on Electron Devices and Solid-State Circuits - Tainan, Taiwan (2007.12.20-2007.12.22)] 2007 IEEE Conference on Electron Devices and Solid-State Circuits - Perfornance Enhancement for Strained HfO2 nMOSFET with Contact Etch Stop Layer (CESL) under Pulsed-IV Measurement
Wu, Woei-Cherng, Chao, Tien-Sheng, Chiu, Te-Hsin, Wang, Jer-Chyi, Lai, Chao-Sung, Ma, Ming-Wen, Lo, Wen-Cheng, Ho, Yi-HsunYear:
2007
Language:
english
DOI:
10.1109/edssc.2007.4450087
File:
PDF, 4.56 MB
english, 2007