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[IEEE IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - Nagoya, Japan (26-30 Jan. 1997)] Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - Si nano-wire SPM probe grown by field evaporation with UHV STM
Ono, T., Saitoh, H., Esashi, M.Year:
1997
Language:
english
DOI:
10.1109/memsys.1997.581792
File:
PDF, 864 KB
english, 1997