[IEEE 2002 Symposium on VLSI Technology Digest of Technical Papers - Honolulu, HI, USA (11-13 June 2002)] 2002 Symposium on VLSI Technology. Digest of Technical Papers (Cat. No.01CH37303) - Integration of high performance dual workfunction logic CMOS transistors with a dense 8F/sup 2/ vertical DRAM cell

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