A self-running standing wave-type bidirectional slider for...

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control 2008 / 08 Vol. 55; Iss. 8

A self-running standing wave-type bidirectional slider for the ultrasonically levitated thin linear stage

Koyama, D., Takei, H., Nakamura, K., Ueha, S.
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Volume:
55
Language:
english
Journal:
IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control
DOI:
10.1109/tuffc.2008.865
Date:
August, 2008
File:
PDF, 991 KB
english, 2008
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