![](/img/cover-not-exists.png)
[IEEE 10th IEEE International Conference on Advanced Thermal Processing of Semiconductors - RTP 2002 - Vancouver, BC, Canada (25-27 Sept. 2002)] 10th IEEE International Conference of Advanced Thermal Processing of Semiconductors - Growth modes and characterization of thin RTP silicon oxides
Eisele, I., Ludsteck, A., Schulze, J., Nenyei, Z.Year:
2002
Language:
english
DOI:
10.1109/rtp.2002.1039433
File:
PDF, 194 KB
english, 2002