Planning wafer allocation for CMOS process development. A...

IEEE Transactions on Semiconductor Manufacturing 1998 / Nov. Vol. 11; Iss. 4

Planning wafer allocation for CMOS process development. A nonparametric approach

Rao, S., Vasanth, K., Mozumder, P.K., Saxena, S., Davis, J.C., Burch, R.
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Volume:
11
Language:
english
Journal:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/66.728555
Date:
January, 1998
File:
PDF, 279 KB
english, 1998
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