[IEEE 2013 IEEE International Electron Devices Meeting (IEDM) - Washington, DC, USA (2013.12.9-2013.12.11)] 2013 IEEE International Electron Devices Meeting - BEOL compatible (300°C) TiN/TiOx/Ta/TiN 3D nanoscale (∼10nm) IMT selector
Lee, Daeseok, Park, Jaesung, Park, Sangsu, Woo, Jiyong, Moon, Kibong, Cha, Euijun, Lee, Sangheon, Song, Jeonghwan, Koo, Yunmo, Hwang, HyunsangYear:
2013
Language:
english
DOI:
10.1109/iedm.2013.6724604
File:
PDF, 1.48 MB
english, 2013