Integration of suspended carbon nanotubes into micro-fabricated devices
Karp, Gabriel A, Ya'akobovitz, Assaf, David-Pur, Moshe, Ioffe, Zvi, Cheshnovsky, Ori, Krylov, Slava, Hanein, YaelVolume:
19
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/19/8/085021
Date:
August, 2009
File:
PDF, 1.07 MB
english, 2009