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[IEEE 11th International Conference on Ion Implantation Technology - Austin, TX, USA (16-21 June 1996)] Proceedings of 11th International Conference on Ion Implantation Technology - The beam performance of the Genus Tandetron 1520 MeV implanter
Tokoro, N., Sakase, T., Bowen, C.M., Maciejowski, P.E., O'Connor, J.P.Year:
1997
Language:
english
DOI:
10.1109/iit.1996.586393
File:
PDF, 347 KB
english, 1997