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[IEEE 2006 International Semiconductor Conference - Sinaia, Romania (2006.09.27-2006.09.29)] 2006 International Semiconductor Conference - Design of Test Structures for Reduced Order Modeling of the Squeeze Film Damping in Mems
Soma, Aurelio, Ballestra, AlbertoYear:
2006
Language:
english
DOI:
10.1109/smicnd.2006.284014
File:
PDF, 4.07 MB
english, 2006