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[IEEE 7th International Conference on Solid-State and Integrated Circuits Technology, 2004. - Beijing, China (Oct. 18-21, 2004)] Proceedings. 7th International Conference on Solid-State and Integrated Circuits Technology, 2004. - Improved diphasic ne-si/a-si-H I-layer materials using PECVD
Huiying Hao,, Shibin Zhang,, Yanyue Xu,, Ximgbo Zeng,, Hongwei Diao,, Guanglin Kong,, Xianbo Liao,Volume:
3
Year:
2004
Language:
english
DOI:
10.1109/icsict.2004.1435239
File:
PDF, 488 KB
english, 2004