[IEEE 2013 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - Suzhou, China (2013.04.7-2013.04.10)] The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Fabrication and characterization of a novel multi-annular type backscattered electron detector for SEM
Yun-Ju Chuang,, Pei-Ru Chen,, Wei-Rui Lin,, Fu-Ron Chen,Year:
2013
Language:
english
DOI:
10.1109/nems.2013.6559778
File:
PDF, 442 KB
english, 2013