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[IEEE Japan International Electronic Manufacturing Technology Symposium - Kanazawa, Japan (June 9-11, 1993)] Proceedings of Japan International Electronic Manufacturing Technology Symposium - A Survey Of Critical Metrology Needs For IC Interconnect Processes Based On Assessment By Quality Function Deployment (qfd) Methodology
Pope, D.E., Prough, S., Wieneke, K.Year:
1993
Language:
english
DOI:
10.1109/iemt.1993.639739
File:
PDF, 636 KB
english, 1993