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[IEEE IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits - Singapore (7-11 July 2003)] Proceedings of the 10th International Symposium on the Physical and Failure Analysis of Integrated Circuits. IPFA 2003 - Plasma charging damage immunities of rapid thermal nitrided oxide and decoupled plasma nitrided oxide

Daniel Chong,, Won Jong Yoo,, Chun Meng Lek,
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Year:
2003
Language:
english
DOI:
10.1109/IPFA.2003.1222754
File:
PDF, 298 KB
english, 2003
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