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[IEEE 2009 IEEE Custom Integrated Circuits Conference (CICC) - San Jose, CA, USA (2009.09.13-2009.09.16)] 2009 IEEE Custom Integrated Circuits Conference - Measurement and analysis of contact plug resistance variability
Balakrishnan, Karthik, Boning, DuaneYear:
2009
Language:
english
DOI:
10.1109/cicc.2009.5280812
File:
PDF, 835 KB
english, 2009