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[IEEE 21st International Reliability Physics Symposium - Phoenix, AZ, USA (1983.04.5-1983.04.7)] 21st International Reliability Physics Symposium - Thickness Dependence of Dielectric Breakdown Failure of Thermal SiO2 Films
Yamabe, Kikuo, Taniguchi, Kenji, Matsushita, YoshiakiYear:
1983
Language:
english
DOI:
10.1109/irps.1983.361982
File:
PDF, 6.77 MB
english, 1983