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[IEEE 2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Shenzhen, China (2009.01.5-2009.01.8)] 2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Etch-back in DDSOG process by ultrasonic agitation and application to tunneling gyroscope fabrication
Wang, Lingyun, Zeng, Yibo, Li, Wenwang, Sun, DaohengYear:
2009
Language:
english
DOI:
10.1109/nems.2009.5068548
File:
PDF, 10.80 MB
english, 2009