Sputter deposition conditions and penetration depth in NbN...

IEEE Transactions on Appiled Superconductivity 2003 / 06 Vol. 13; Iss. 2

Sputter deposition conditions and penetration depth in NbN thin films

Hu, R., Kerber, G.L., Luine, J., Ladizinsky, E., Bulman, J.
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Volume:
13
Language:
english
Journal:
IEEE Transactions on Appiled Superconductivity
DOI:
10.1109/tasc.2003.812227
Date:
June, 2003
File:
PDF, 252 KB
english, 2003
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