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[IEEE 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems - Tucson, AZ, USA (2008.01.13-2008.01.17)] 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems - A new method to determine the mechanical resonance frequency, quality factor and charging in electrostatically actuated MEMS
Kalicinski, S., Tilmans, H.A.C., Wevers, M., De Wolf, I.Year:
2008
Language:
english
DOI:
10.1109/memsys.2008.4443741
File:
PDF, 404 KB
english, 2008