Electrostatic correction of structural imperfections...

Journal of Microelectromechanical Systems 2005 / 04 Vol. 14; Iss. 2

Electrostatic correction of structural imperfections present in a microring gyroscope

Gallacher, B.J., Hedley, J., Burdess, J.S., Harris, A.J., Rickard, A., King, D.O.
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Volume:
14
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2004.839325
Date:
April, 2005
File:
PDF, 3.66 MB
english, 2005
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